Q2055: Electron Beam Lithography
Vocabulary ID
http://matvoc.nims.go.jp/entity/Q2055
Simliar
| Language | Label | Description | Alias |
|---|---|---|---|
| English | Electron Beam Lithography | ARIM instrument classification | - |
| Japanese | 電子線描画（EB） | 先端RI(ARIM)装置分類 | - |
| Language | English |
|---|---|
| Label | Electron Beam Lithography |
| Description | ARIM instrument classification |
| Alias |
| Language | Japanese |
|---|---|
| Label | 電子線描画（EB） |
| Description | 先端RI(ARIM)装置分類 |
| Alias |