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Q2245: Electron Beam Lithography

Vocabulary ID

http://matvoc.nims.go.jp/entity/Q2245

Language Label Description Alias
English Electron Beam Lithography DICE instrument classification -
Japanese 電子線描画(EB) DICE装置分類 -
Language English
Label Electron Beam Lithography
Description DICE instrument classification
Alias
Language Japanese
Label 電子線描画(EB)
Description DICE装置分類
Alias