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Q2054: Maskless Exposure System

Vocabulary ID

http://matvoc.nims.go.jp/entity/Q2054

Language Label Description Alias
English Maskless Exposure System ARIM instrument classification -
Japanese 光露光(マスクレス、直接描画) 先端RI(ARIM)装置分類 -
Language English
Label Maskless Exposure System
Description ARIM instrument classification
Alias
Language Japanese
Label 光露光(マスクレス、直接描画)
Description 先端RI(ARIM)装置分類
Alias