Language	Label	Description	Alias
English	Maskless Exposure System	DICE instrument classification	-
Japanese	光露光（マスクレス、直接描画）	DICE装置分類	-

Language	English
Label	Maskless Exposure System
Description	DICE instrument classification
Alias

Language	Japanese
Label	光露光（マスクレス、直接描画）
Description	DICE装置分類
Alias

Semantic Relatives

Parent

Q2083: Lithography

Siblings:

• Q2242: Mask Aligner
• Q2243: Stepper
• Q2245: Electron Beam Lithography
• Q2246: Nanoimprint Lithography