Language	Label	Description	Alias
English	lithography	-	-
Japanese	リソグラフィー	-	-

Language	English
Label	lithography
Description
Alias

Language	Japanese
Label	リソグラフィー
Description
Alias

Semantic Relatives

Parents

Q461: mechanical and surface

Siblings:

• Q462: doctor blade or blade coating
• Q463: focused ion beam
• Q464: joining
• Q466: polishing
• Q467: sectioning
• Q468: thermal plasma processing
• Q3394: Chemical-Mechanical Polishing
• Q3395: substrate cleaning
• Q3396: electrode formation
• Q3397: plating technology

Children

• Q3359: epitaxial layer formation
• Q3398: resist coating
• Q3399: photomask
• Q3400: exposure
• Q3401: mask aligner
• Q3402: stepper
• Q3403: maskless direct drawing
• Q3404: electron beam drawing
• Q3405: laser processing
• Q3406: developing
• Q3407: nanoimprint
• Q3412: ion injection
• Q3413: oxidation
• Q3414: diffusion