Language	Label	Description	Alias
English	stepper	-	-
Japanese	光露光（ステッパ）	-	-

Language	English
Label	stepper
Description
Alias

Language	Japanese
Label	光露光（ステッパ）
Description
Alias

Semantic Relatives

Parents

Q465: lithography

Siblings:

• Q3359: epitaxial layer formation
• Q3398: resist coating
• Q3399: photomask
• Q3400: exposure
• Q3401: mask aligner
• Q3403: maskless direct drawing
• Q3404: electron beam drawing
• Q3405: laser processing
• Q3406: developing
• Q3407: nanoimprint
• Q3412: ion injection
• Q3413: oxidation
• Q3414: diffusion