Language	Label	Description	Alias
English	substrate cleaning	-	-
Japanese	基板洗浄	-	-

Language	English
Label	substrate cleaning
Description
Alias

Language	Japanese
Label	基板洗浄
Description
Alias

Semantic Relatives

Parent

Q461: mechanical and surface

Siblings:

• Q462: doctor blade or blade coating
• Q463: focused ion beam
• Q464: joining
• Q465: lithography
• Q466: polishing
• Q467: sectioning
• Q468: thermal plasma processing
• Q3394: Chemical-Mechanical Polishing
• Q3396: electrode formation
• Q3397: plating technology