Q2057: Dry Etching(Reactive Ion Etching)
Vocabulary ID
http://matvoc.nims.go.jp/entity/Q2057
Language | Label | Description | Alias |
---|---|---|---|
English | Dry Etching(Reactive Ion Etching) | ARIM instrument classification | RIE |
Japanese | ドライエッチング(RIE) | 先端RI(ARIM)装置分類 | RIE |
Language | English |
---|---|
Label | Dry Etching(Reactive Ion Etching) |
Description | ARIM instrument classification |
Alias | RIE |
Language | Japanese |
---|---|
Label | ドライエッチング(RIE) |
Description | 先端RI(ARIM)装置分類 |
Alias | RIE |