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Q2057: Dry Etching(Reactive Ion Etching)

Vocabulary ID

http://matvoc.nims.go.jp/entity/Q2057

Language Label Description Alias
English Dry Etching(Reactive Ion Etching) ARIM instrument classification RIE
Japanese ドライエッチング(RIE) 先端RI(ARIM)装置分類 RIE
Language English
Label Dry Etching(Reactive Ion Etching)
Description ARIM instrument classification
Alias RIE
Language Japanese
Label ドライエッチング(RIE)
Description 先端RI(ARIM)装置分類
Alias RIE