Difference between revisions of "Dry Etching(Electron Cyclotron Resonance-RIE) (Q2059)"
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(Created claim: part of dictionary (P11): ARIM Instrument Dictionary (Q1882)) |
(Created claim: similar to item (P40): Dry Etching(Electron Cyclotron Resonance-RIE) (Q2248)) |
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| Property / similar to item: Dry Etching(Electron Cyclotron Resonance-RIE) / rank | |||
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Latest revision as of 00:26, 28 April 2022
ARIM instrument classification
- ECR-RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English |
Dry Etching(Electron Cyclotron Resonance-RIE)
|
ARIM instrument classification
|
|