{"entities":{"Q2059":{"pageid":2125,"ns":120,"title":"Item:Q2059","lastrevid":21037,"modified":"2022-04-28T00:26:32Z","type":"item","id":"Q2059","labels":{"en":{"language":"en","value":"Dry Etching(Electron Cyclotron Resonance-RIE)"},"ja":{"language":"ja","value":"\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\uff08ECR\uff09"}},"descriptions":{"en":{"language":"en","value":"ARIM instrument classification"},"ja":{"language":"ja","value":"\u5148\u7aefRI(ARIM)\u88c5\u7f6e\u5206\u985e"}},"aliases":{"en":[{"language":"en","value":"ECR-RIE"}],"ja":[{"language":"ja","value":"ECR-RIE"}]},"claims":{"P8":[{"mainsnak":{"snaktype":"value","property":"P8","hash":"5f4bfaf335aa544de4c630f7a3c210846f1d36cf","datavalue":{"value":{"entity-type":"item","numeric-id":1918,"id":"Q1918"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2059$69f28078-405f-4ad8-aa60-c1edb6dd29a3","rank":"normal"}],"P11":[{"mainsnak":{"snaktype":"value","property":"P11","hash":"8c2b9704e4f36eba5db3450c39929087e50c0117","datavalue":{"value":{"entity-type":"item","numeric-id":1882,"id":"Q1882"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2059$20c53b9a-4c4c-419a-9ab1-189e40cb4e58","rank":"normal"}],"P40":[{"mainsnak":{"snaktype":"value","property":"P40","hash":"5f0fe42013c4fa3d353484f93cb572419e0d1c97","datavalue":{"value":{"entity-type":"item","numeric-id":2248,"id":"Q2248"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2059$b887ad2b-d775-4f4b-9e81-2eefb33cd41a","rank":"normal"}]},"sitelinks":{}}}}