Difference between revisions of "Dry Etching(Electron Cyclotron Resonance-RIE) (Q2059)"
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(Changed an Item: Item created by hirosawa) |
(Created claim: similar to item (P40): Dry Etching(Electron Cyclotron Resonance-RIE) (Q2248)) |
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| aliases / ja / 0 | aliases / ja / 0 | ||
| + | ECR-RIE | ||
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| Property / has broader: Etching / rank | |||
| + | Normal rank | ||
| Property / part of dictionary | |||
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| Property / part of dictionary: ARIM Instrument Dictionary / rank | |||
| + | Normal rank | ||
| Property / similar to item | |||
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| Property / similar to item: Dry Etching(Electron Cyclotron Resonance-RIE) / rank | |||
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Latest revision as of 00:26, 28 April 2022
ARIM instrument classification
- ECR-RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English |
Dry Etching(Electron Cyclotron Resonance-RIE)
|
ARIM instrument classification
|
|