Language	Label	Description	Alias
English	Sputtering	ARIM instrument classification	-
Japanese	スッパタリング（スパッタ）	先端RI(ARIM)装置分類	-

Language	English
Label	Sputtering
Description	ARIM instrument classification
Alias

Language	Japanese
Label	スッパタリング（スパッタ）
Description	先端RI(ARIM)装置分類
Alias

Semantic Relatives

Parent

Q1905: Film formation, Deposition

Siblings:

• Q2035: Atomic Layer Deposition System
• Q2036: Coater
• Q2037: Chemical Vapor Deposition System
• Q2038: Electrodeposition System
• Q2039: Physical Vapor Deposition System
• Q2040: Ink-Jet Deposition System
• Q2041: Langmuir-Blodgett Film Deposition System
• Q2042: Plasma Spray System