Language	Label	Description	Alias
English	Sputtering	DICE instrument classification	-
Japanese	スッパタリング（スパッタ）	DICE装置分類	-

Language	English
Label	Sputtering
Description	DICE instrument classification
Alias

Language	Japanese
Label	スッパタリング（スパッタ）
Description	DICE装置分類
Alias

Semantic Relatives

Parent

Q2081: Film formation, Deposition

Siblings:

• Q2225: Atomic Layer Deposition System
• Q2226: Coater
• Q2227: Chemical Vapor Deposition System
• Q2228: Electrodeposition System
• Q2229: Physical Vapor Deposition System
• Q2230: Ink-Jet Deposition System
• Q2231: Langmuir-Blodgett Film Deposition System
• Q2232: Plasma Spray System