dry etching(Electron Cycrotron Resonance) (Q3409): Difference between revisions
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(Created claim: has broader (P8): dissolving _ etching (Q488)) |
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| label / ja | label / ja | ||
ドライエッチング（ECR） | |||
| Property / has broader | |||
| Property / has broader: dissolving _ etching / rank | |||
Normal rank | |||
| Property / has broader: dissolving _ etching / reference | |||
Latest revision as of 00:24, 6 March 2023
No description defined
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | dry etching(Electron Cycrotron Resonance) |
No description defined |