Dry Etching(Reactive Ion Etching) (Q2247): Difference between revisions
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(Created claim: has broader (P8): Etching (Q2084)) |
(Created claim: similar to item (P40): Dry Etching(Reactive Ion Etching) (Q2057)) |
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| Property / part of dictionary: DICE Instrument Dictionary / rank | |||
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| Property / similar to item: Dry Etching(Reactive Ion Etching) / rank | |||
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Latest revision as of 04:51, 25 April 2022
DICE instrument classification
- RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dry Etching(Reactive Ion Etching) |
DICE instrument classification |
|