Difference between revisions of "Maskless Exposure System (Q2054)"
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(Created claim: has broader (P8): Lithography (Q1917)) |
(Created claim: part of dictionary (P11): ARIM Instrument Dictionary (Q1882)) |
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| Property / part of dictionary | |||
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| Property / part of dictionary: ARIM Instrument Dictionary / rank | |||
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Revision as of 06:38, 9 December 2021
ARIM instrument classification
| Language | Label | Description | Also known as |
|---|---|---|---|
| English |
Maskless Exposure System
|
ARIM instrument classification
|