Q3409: dry etching(Electron Cycrotron Resonance)
Vocabulary ID
http://matvoc.nims.go.jp/entity/Q3409
| Language | Label | Description | Alias |
|---|---|---|---|
| English | dry etching(Electron Cycrotron Resonance) | - | - |
| Japanese | ドライエッチング（ECR） | - | - |
| Language | English |
|---|---|
| Label | dry etching(Electron Cycrotron Resonance) |
| Description | |
| Alias |
| Language | Japanese |
|---|---|
| Label | ドライエッチング（ECR） |
| Description | |
| Alias |