Language	Label	Description	Alias
English	dry etching(Electron Cycrotron Resonance)	-	-
Japanese	ドライエッチング（ECR）	-	-

Language	English
Label	dry etching(Electron Cycrotron Resonance)
Description
Alias

Language	Japanese
Label	ドライエッチング（ECR）
Description
Alias

Semantic Relatives

Parent

Q488: dissolving _ etching

Siblings:

• Q3408: dry etching(Reactive Ion Etching)
• Q3410: dry etching(others)
• Q3411: wet etching