Dry Etching(Electron Cyclotron Resonance-RIE) (Q2248): Difference between revisions
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(Created claim: part of dictionary (P11): DICE Instrument Dictionary (Q1883)) |
(Created claim: similar to item (P40): Dry Etching(Electron Cyclotron Resonance-RIE) (Q2059)) |
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| Property / similar to item: Dry Etching(Electron Cyclotron Resonance-RIE) / rank | |||
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Latest revision as of 04:42, 25 April 2022
DICE instrument classification
- ECR-RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dry Etching(Electron Cyclotron Resonance-RIE) |
DICE instrument classification |
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