Dry Etching(Electron Cyclotron Resonance-RIE) (Q2248): Difference between revisions
Jump to navigation
Jump to search
(Changed an Item: Item created by hirosawa) |
(Created claim: similar to item (P40): Dry Etching(Electron Cyclotron Resonance-RIE) (Q2059)) |
||
| (5 intermediate revisions by the same user not shown) | |||
| aliases / en / 0 | aliases / en / 0 | ||
ECR-RIE | |||
| aliases / ja / 0 | aliases / ja / 0 | ||
ECR-RIE | |||
| description / ja | description / ja | ||
DICE装置分類 | |||
| Property / has broader | |||
| Property / has broader: Etching / rank | |||
Normal rank | |||
| Property / part of dictionary | |||
| Property / part of dictionary: DICE Instrument Dictionary / rank | |||
Normal rank | |||
| Property / similar to item | |||
| Property / similar to item: Dry Etching(Electron Cyclotron Resonance-RIE) / rank | |||
Normal rank | |||
Latest revision as of 04:42, 25 April 2022
DICE instrument classification
- ECR-RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dry Etching(Electron Cyclotron Resonance-RIE) |
DICE instrument classification |
|