Difference between revisions of "Dry Etching(Reactive Ion Etching) (Q2057)"
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(Created a new Item: Item created by hirosawa) |
(Created claim: similar to item (P40): Dry Etching(Reactive Ion Etching) (Q2247)) |
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| (7 intermediate revisions by one other user not shown) | |||
| label / ja | label / ja | ||
| + | ドライエッチング（RIE） | ||
| aliases / en / 0 | aliases / en / 0 | ||
| + | RIE | ||
| aliases / ja / 0 | aliases / ja / 0 | ||
| + | RIE | ||
| description / en | description / en | ||
| + | ARIM instrument classification | ||
| description / ja | description / ja | ||
| + | 先端RI(ARIM)装置分類 | ||
| Property / has broader | |||
| + | |||
| Property / has broader: Etching / rank | |||
| + | Normal rank | ||
| Property / part of dictionary | |||
| + | |||
| Property / part of dictionary: ARIM Instrument Dictionary / rank | |||
| + | Normal rank | ||
| Property / similar to item | |||
| + | |||
| Property / similar to item: Dry Etching(Reactive Ion Etching) / rank | |||
| + | Normal rank | ||
Latest revision as of 00:26, 28 April 2022
ARIM instrument classification
- RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English |
Dry Etching(Reactive Ion Etching)
|
ARIM instrument classification
|
|