Difference between revisions of "Dry Etching(Electron Cyclotron Resonance-RIE) (Q2248)"
Jump to navigation
Jump to search
(Created claim: part of dictionary (P11): DICE Instrument Dictionary (Q1883)) |
(Created claim: similar to item (P40): Dry Etching(Electron Cyclotron Resonance-RIE) (Q2059)) |
||
| Property / similar to item | |||
| + | |||
| Property / similar to item: Dry Etching(Electron Cyclotron Resonance-RIE) / rank | |||
| + | Normal rank | ||
Latest revision as of 04:42, 25 April 2022
DICE instrument classification
- ECR-RIE
| Language | Label | Description | Also known as |
|---|---|---|---|
| English |
Dry Etching(Electron Cyclotron Resonance-RIE)
|
DICE instrument classification
|
|