Difference between revisions of "Atomic Layer Deposition System (Q2225)"
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(Created claim: has broader (P8): Film formation, Deposition (Q2081)) |
(Created claim: part of dictionary (P11): DICE Instrument Dictionary (Q1883)) |
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Property / part of dictionary | |||
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Property / part of dictionary: DICE Instrument Dictionary / rank | |||
+ | Normal rank |
Revision as of 05:46, 10 December 2021
DICE instrument classification
- ALD
Language | Label | Description | Also known as |
---|---|---|---|
English |
Atomic Layer Deposition System
|
DICE instrument classification
|
|