Language	Label	Description	Alias
English	Photoresist Spin Coater	DICE instrument classification
Japanese	レジスト塗布	DICE装置分類

Language	English
Label	Photoresist Spin Coater
Description	DICE instrument classification
Alias

Language	Japanese
Label	レジスト塗布
Description	DICE装置分類
Alias

Semantic Relatives

Parent

Q2085: Processing

Siblings:

• Q2255: Bonder
• Q2252: Oxidization System
• Q2253: Diffusion System
• Q2254: Ion Implantation
• Q2257: Photoresist Developer