Language	Label	Description	Alias
English	Photoresist Spin Coater	DICE instrument classification	-
Japanese	レジスト塗布	DICE装置分類	-

Language	English
Label	Photoresist Spin Coater
Description	DICE instrument classification
Alias

Language	Japanese
Label	レジスト塗布
Description	DICE装置分類
Alias

Semantic Relatives

Parent

Q2085: Processing

Siblings:

• Q2255: Bonder
• Q2252: Oxidization System
• Q2253: Diffusion System
• Q2254: Ion Implantation
• Q2257: Photoresist Developer